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发明名称
CHARGED PARTICLE BEAM PROJECTION OPTICAL SYSTEM AND ITS MANUFACTURE
摘要
申请公布号
JPH11168058(A)
申请公布日期
1999.06.22
申请号
JP19970347322
申请日期
1997.12.03
申请人
NIKON CORP
发明人
NAKASUJI MAMORU
分类号
G03F7/20;H01J37/141;H01J37/147;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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