Anodic bonded plasma addressed liquid crystal displays

摘要

A process for fabricating the channel substrate of a plasma-addressed electro-optic display device comprising a layer of electro-optic material, data electrodes coupled to the electro-optic layer and adapted to receive data voltages for activating portions of the electro-optic layer, and a plurality of plasma channels extending generally transverse to the data electrodes for selectively switching on said electro-optic portions and closed off by a thin dielectric sheet, typically a thin glass sheet. The channel substrate is fabricated using anodic bonding to attach the thin glass sheet to an etched or walled preferably glass substrate containing the channels. This reduces stresses in the thin glass sheet. Reduced stress allows post processing of the thin sheet, particularly further etching to reduce its thickness.