| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to suppress the reflection of light and to surely and easily inspect the foreign matter on the surface a pellicle film by providing the surface of an adhesive layer with the pellicle film having the brightness of a specific end face. SOLUTION: The top end face of a pellicle frame 1 is stretched and provided with the pellicle film 2 via the adhesive layer. Ordinarily a tacky adhesive layer 3 is further formed in the lower part of the pellicle frame 1 and a peelable release layer 4 is affixed to the bottom end face thereof. The characteristic of the pellicle to be used is 0 to 60 in the brightness at the end face of the pellicle 2 existing on the adhesive layer when the brightness is measured by a method stipulated in JIS(Japanese Industrial Standards) Z 8741-43 by using rays of a wavelength 400 to 1,100 nm; As a result, at the time of inspecting the foreign matter on the pellicle film 2 by illumination with a halogen lamp, etc., the reflected light from the end face of the pellicle film 2 decreases and, therefore, the sure and easy inspection even in the extreme proximity of the pellicle frame 1 is possible. The material of the pellicle frame 1 includes the anodic oxidation treated material of an aluminum material, stainless steel, polyacetal, etc. |
