WET ETCHING METHOD AND EQUIPMENT,申请号JP19970348633-传众专利搜索

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发明名称	WET ETCHING METHOD AND EQUIPMENT
摘要
申请公布号	JPH11168081(A)	申请公布日期	1999.06.22
申请号	JP19970348633	申请日期	1997.12.03
申请人	HITACHI LTD;HITACHI ELECTRON ENG CO LTD;HITACHI TOKYO ELECTRON CO LTD	发明人	TAMURA MINORU;TAKEUCHI YOSHIAKI;OKAMURA TAKAHIRO
分类号	H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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