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经营范围
发明名称
METHOD AND APPARATUS FOR CLEANING SURFACE
摘要
申请公布号
JPH11165139(A)
申请公布日期
1999.06.22
申请号
JP19970330137
申请日期
1997.12.01
申请人
SUMITOMO HEAVY IND LTD
发明人
HOSAKA HISAO
分类号
B08B5/02;H01L21/304;(IPC1-7):B08B5/02
主分类号
B08B5/02
代理机构
代理人
主权项
地址
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