发明名称 Method of manufacturing semiconductor device having a peak concentration
摘要 A semiconductor device includes a field insulating film, a channel stopper, and a diffusion layer. The field insulating film is formed on one major surface of a semiconductor substrate of a first conductivity type to surround an element region. The channel stopper of the first conductivity type is formed immediately below the field insulating film. The diffusion layer of an opposite conductivity type is formed to be adjacent to the channel stopper. The impurity concentration peak position of the diffusion layer substantially coincides with that of the channel stopper.
申请公布号 US5915184(A) 申请公布日期 1999.06.22
申请号 US19970956681 申请日期 1997.10.23
申请人 NEC CORPORATION 发明人 SATO, NATSUKI
分类号 H01L21/76;H01L21/28;H01L21/768;H01L21/822;H01L21/8242;H01L23/522;H01L27/04;H01L27/108;(IPC1-7):H01L29/76 主分类号 H01L21/76
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