SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a constitution, wherein TFTs having a crystallinity, which requires a peripheral circuit region, and a pixel region on the same substrate in an active-matrix liquid crystal display device, is formed. SOLUTION: A TFT for peripheral circuit region use and a TFT for pixel region use are formed on the same substrate using a crystalline silicon film. This crystalline silicon film is formed by method wherein a catalyst element (such as nickel) for accelerating a crystallization of an amorphous silicon film is introduced in the amorphous silicon film and the amorphous silicon film is crystallized by heating. At this time, as a crystallinity, which is required by peripheral circuit regions A, A', B and B', and a crystallinity, which is required by a pixel region, are different from each other, the implantation amount of the pixel is selectively changed according to the regions A, A', B and B' and the pixel region.