发明名称 DRAM applications using vertical MISFET devices
摘要 The present invention relates to RAM circuits comprising memory cells and logic circuitry wherein each of the memory cells comprise at least one Vertical MISFET device comprising a stack of several layers a source layer, a channel layer, a drain layer and a capacitor on the top of the stack of several layers of the Vertical MISFET device.
申请公布号 US5914504(A) 申请公布日期 1999.06.22
申请号 US19960664874 申请日期 1996.06.17
申请人 IMEC VZW 发明人 AUGUSTO, CARLOS JORGE RAMIRO PROENCA
分类号 H01L21/8238;H01L27/092;H01L29/165;H01L29/45;H01L29/78;H01L29/786;(IPC1-7):H01L31/032;H01L31/033;H01L31/072;H01L31/10 主分类号 H01L21/8238
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