MATERIAL HAVING FLUOROPLASTIC FORMED ON SURFACE FLUORINATED PASSIVATED FILM AND VARIOUS DEVICES AND PARTS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a material capable of being inexpensively and easily produced within a short time, capable of forming a thick fluorocarbon film only on an objective surface, having sufficient corrosion resistance against corrosive gas or semiconductor process gas such as special gas or the like, especially, against plasma and a chemical soln. and having fluoroplastic formed on the surface of a fluorinated passivated film transmitting ultrasonic waves. SOLUTION: A fluorinated passivated film is provided on the surface of a base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating. Or, the fluorinated passivated film is provided on the surface of the base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating to be irradiated with plasma.