Ventilation hood with enhanced particle control and method of using

摘要

An apparatus for cleaning a process chamber that includes a ventilation hood which has a fluid flow channel attached to an inner peripheral wall of the hood body equipped with a plurality of fluid nozzles pointing downwardly toward a process chamber cavity when the hood is positioned on such process chamber, and a method for using the apparatus. A purge gas flown through the fluid nozzles carries substantially all contaminating fumes or particles away from the process chamber cavity into an air evacuation system such as a factory vacuum exhaust system such that contamination of the process chamber can be essentially eliminated.