发明名称 |
PZT microdevice |
摘要 |
A micromechanical device or microactuator based upon the piezoelectric, pyroelectric, and electrostrictive properties of ferroelectric thin film ceramic materials such as PZT. The microdevice has a device substrate and a deflectable component. The deflectable component is mounted for deflection on the device substrate and has a sensor/actuator. The sensor/actuator has first and second electrodes and a piezoelectric thin film disposed between the first and second electrodes. The thin film is preferably PZT. The sensor/actuator is disposed on a sensor/actuator substrate. The sensor/actuator substrate is formed of a material selected for being resistive to attack by hydrofluoric acid vapor. The invention also relates to a method for fabricating such micromechanical devices or microactuators.
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申请公布号 |
US5914507(A) |
申请公布日期 |
1999.06.22 |
申请号 |
US19960739808 |
申请日期 |
1996.10.30 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
POLLA, DENNIS L.;KIM, JOON HAN |
分类号 |
H01L41/09;(IPC1-7):H01L29/82 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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