| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent breakage of a glass substrate by providing a substrate supporting base supporting a tip part of the glass substrate and a substrate fixing base which is provided on the substrate supporting base and supports the glass substrate to prevent hanging down and reducing hanging down amount when the glass substrate is mounted on a cassette for loading. SOLUTION: A cassette 100 for loading of a glass substrate 30 has about 13 sheets of glass substrates 30 and about 13 horizontal substrate supporting bases 50. These are made each of pair. Namely, a sheet of glass substrate 30 is mounted on a horizontal substrate supporting base 50. At almost the center part of these, a projecting substrate fixing base 90 supporting the glass substrate 30 is provided. In the horizontal substrate supporting base 50, hanging down amount of the glass substrate 30 is minimized by horizontally supporting the loaded glass substrate 30 by the substrate fixing base 90. In the case of the glass substrate 30 of a size of about 670 mm×about 830 mm as an example, the hanging amount is within about 1 mm and the glass substrate 30 is substantially horizontal.</p> |
