CHARGED PARTICLE BEAM TRANSFERRING APPARATUS AND CHARGED PARTICLE BEAM TRANSFERRING METHOD,申请号JP19980254694-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM TRANSFERRING APPARATUS AND CHARGED PARTICLE BEAM TRANSFERRING METHOD
摘要
申请公布号	JPH11167889(A)	申请公布日期	1999.06.22
申请号	JP19980254694	申请日期	1998.08.26
申请人	NIKON CORP	发明人	NAKASUJI MAMORU;SUZUKI SHOHEI
分类号	G03F7/20;H01J37/153;H01J37/305;H01L21/027;(IPC1-7):H01J37/153	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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