| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample for observation by a transmission electron microscope, by which the quantitative analysis of an element is made possible through energy distribution type X-ray analysis and to provide a method for quantitatively analyzing an element using the sample. SOLUTION: A sample for observation buy a transmission electron microscope is preferably fabricated using a focused-ion-beam processing device. in a method for quantitatively analyzing an element using the sample, a machined groove C1 having a width of t4 is provided on the surface of the sample to serve as the electron-ray incidence side, and a machined groove C2 having a width of t5 is provided on the surface of the sample opposite to the above surface to serve as the electron-ray transmission side, the width t5 (μm) of the machined groove C2 meeting the formula: t5 >=t4 (μm)+10μm...(1) Also, the width t4 of the machined groove C1 and the distance t6 from the end face Se of the sample serving as the electron-ray transmission side to the center surface Sc of the thickness of a thin-film layer 4 preferably meet the formulae: t4 >=15μm...(2) 20μm>=t6 >=1μm...(3).
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