| 发明名称 |
Polishing device with improved handling of fluid polishing media |
| 摘要 |
<p>A retainer ring for retaining a thin workpiece during machining thereof, the retaining ring being of a design which facilitates distribution of an abrasive slurry used in the machining operation.</p> |
| 申请公布号 |
SG65646(A1) |
申请公布日期 |
1999.06.22 |
| 申请号 |
SG19970001082 |
申请日期 |
1997.04.09 |
| 申请人 |
SPEEDFAM CORPORATION |
发明人 |
INKI KIM |
| 分类号 |
B24B37/32;B24B57/02;(IPC1-7):B24B29/02;B24B37/04 |
主分类号 |
B24B37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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