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发明名称
摘要
申请公布号
JP2906499(B2)
申请公布日期
1999.06.21
申请号
JP19890319872
申请日期
1989.12.08
申请人
NIPPON DENKI KK
发明人
SHIMIZU JUNZO;PPONMA TETSUYA;MURAO YUKINOBU
分类号
H01L21/316;H01L21/336;H01L29/78;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
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