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发明名称
摘要
申请公布号
JP2906986(B2)
申请公布日期
1999.06.21
申请号
JP19940056106
申请日期
1994.03.25
申请人
NIPPON DENKI KK
发明人
KITAJIMA HIROSHI;SHIROMIZU YOSHIMI
分类号
H01L21/306;B08B3/08;C02F1/46;C02F1/461;C02F1/467;H01L21/00;H01L21/30;H01L21/304;H01L21/3063;H01L21/308;(IPC1-7):H01L21/304
主分类号
H01L21/306
代理机构
代理人
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地址
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