| 摘要 |
PURPOSE:To provide a production method for crystalline silicon nitride powder capable of controlling the oxygen content of the crystalline silicon nitride powder and producing crystalline silicon nitride powder having excellent calcination properties, etc., at a good productivity on a large scale. CONSTITUTION:Noncrystalline silicon nitride powder is baked in an atmosphere of a nitrogen-containing inert gas containing 0.05-1% of oxygen. |
