METAL ARYL KETONE ALCOHOLATE SOLUTION STABLE IN STORAGE USED FOR THIN FILM PHOTOINITIATION AND PATTERN FORMATION BY USING SAME

摘要

PROBLEM TO BE SOLVED: To obtain a photopatterning sol-gel solution stabilized against hydrolysis by using the photosensitive material having bonds with ketone and alkoxide to be decomposed and freed of the ketone group and the aryl group. SOLUTION: The photosensitive material comprises the aryl group for giving sterical hindrance to the metal atom and preventing the hydrolysis and the ketone group for further preventing it by coordination on the metal atom and the alkoxide group coordinated by the metal atom together with the ketone group. When it is exposed to the electromagnetic waves, the coordination is decomposed and the aryl group and ketone group are both released. It is preferred that the photosensitive material represented by the formula in which M is a metal atom having a atomic valence X; Z is an integer of <=X; L is a 1-11 C alkoxy group or the like; each of R1 and R2 is a 1-11 C alkyl or alkenyl group or the like; and R3 is an aryl group.