| 摘要 |
PROBLEM TO BE SOLVED: To make magnification of an X-ray aligner correctable in a short time without applying heat nor external force to an X-ray mask at a time of transferring a large-area fine circuit pattern to a work, such as the semiconductor substrate, etc., by correcting the magnification at the transferring time by deforming an X-ray mirror. SOLUTION: A mirror curvature controller 3 is set up on the back 2c of a cylindrical vibrating mirror 2 having a curvature in the horizontal direction. The controller 3 changes the curvature of the mirror 2 by deforming a piezoelectric element 31 at the center on the back 2c of the mirror 2c, by impressing a necessary voltage upon the element 31 from a power source 32. When the curvature of the mirror 2 is changed, angle of divergence of X-rays in reflected synchrotron radiation light in the horizontal direction changes. When the angle of divergence changes, the direction of X-rays made incident to an X-ray mask changes and the transferring position of a mask pattern changes. Since no heat nor external force is applied to the X-ray mask, the mask has no danger of breakage. |
