| 摘要 |
PROBLEM TO BE SOLVED: To analyze a contaminant substance with high sensitivity by efficiently capturing only a contaminant to be a problem in a semiconductor industry in an apparatus for capturing a semiconductor contaminant substance contained in a clean room air. SOLUTION: Silicon powder 3 comminuted to 100 to 500μm is charged in a quartz tube 2. When a pump 4 is driven, the air is sucked from an air suction port 1. At this time, an ester compound, siloxane compound or the like is adsorbed to the powder. And, the compound which does not become a problem in a semiconductor industry is not adsorbed, but discharged together with the air. Thereafter, the tube is heated by a heater, and the substance is introduced to a cold trap. This is cooled by liquid nitrogen, then abruptly heated by a high frequency wave, and hence the substance is introduced to a separation column of a gas chromatograph.
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