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发明名称
CHARGED BEAM DRAWING LENS-BARREL
摘要
申请公布号
JPH11162385(A)
申请公布日期
1999.06.18
申请号
JP19970342310
申请日期
1997.11.27
申请人
TOSHIBA MACH CO LTD
发明人
SUZUKI YOSHIO
分类号
G21K5/04;G03F7/20;H01J37/147;H01J37/305;H01L21/027;(IPC1-7):H01J37/147
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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