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发明名称
INLINE CURE FURNACE MECHANISM
摘要
申请公布号
JPH11163236(A)
申请公布日期
1999.06.18
申请号
JP19970332213
申请日期
1997.12.02
申请人
SEIKO EPSON CORP
发明人
MARUYAMA DAISUKE
分类号
C21D1/74;F27D7/06;H01L23/40;H01L23/50;(IPC1-7):H01L23/40
主分类号
C21D1/74
代理机构
代理人
主权项
地址
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