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发明名称
MANUFACTURE OF SEMICONDUCTOR MANUFACTURE DEVICE
摘要
申请公布号
JPH11162964(A)
申请公布日期
1999.06.18
申请号
JP19970328073
申请日期
1997.11.28
申请人
SEIKO EPSON CORP
发明人
WATABE ATSUSHI
分类号
H01L21/31;H01L21/304;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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