| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor accelerometer whose sensitivity is high and whose temperature characteristic is excellent without making the width of a beam part large. SOLUTION: A semiconductor accelerometer is provided with a plumb hob 1 which is subjected to an acceleration so as to be displaced, with a flexure which comprises a central part 2a and a beam 2b which is extended to all directions from the outer edge of the central part 2a and in which the plumb hob 1 is coupled to the rear surface of the central part 2a, with a support member 3 which supports the flexure 2 and with piezoresistances RX1 to RX4, RY1 to RY4 by which a strain generated in the flexure 2 due to the displacement of the plumb hob 1 is detected in at least two directions, i.e. the X-axis direction and the Y-axis direction. The piezoresistances RX1 to RX4, RY1 to RY4 are arranged near the coupling part of the central parts 2a to the beam 2b. The piezoresistances RX1 to RX4, RY1 to RY4 in the respective axial directions are constituted of a bridge circuit. Then, interconnections 4 which connect the piezoresistances RX1 to RX4, RY1 o RY4 which are installed so as to sandwich the central part 2a in the respective axial directions are formed on the central part 2a. The interconnections 4 in the respective axial directions are crossed orthogonally. Middle points of the interconnections 4 in the respective axial directions are derived electrically onto the support member 3 via a part on the beam 2b in the different axial directions. |
