| 摘要 |
PROBLEM TO BE SOLVED: To obviate the adhesion of dust to the light incident surfaces of dielectric substance blocks and to suppress the degradation in the optical coupling efficiency of an optical coupler by previously forming water resistant protective films on at least either of the light incident surface and light reflection surfaces of the dielectric substance blocks and removing the film after dicing. SOLUTION: An optical waveguide layer 2 and an upper clad layer 3 are laminated on a substrate 1, by which an optical waveguide element is constituted. A capillary 8 is positioned and regulated near the light incident surface 4a of the dielectric substance block 4 adhered and fixed by an adhesive 5 to the surface of the upper clad layer 3 via a photoresist layer 6 and a required amt. of a protective film material 7 is extruded from its front end. After the protective film material 7 dries, the substrate 1 is diced to the regions inclusive of the respective dielectric substance blocks 4. Since the light incident surfaces 4a of the dielectric substance blocks 4 are protected by the protective films, the dust generated by dicing does not directly adhere to the light incident surfaces 4a of the dielectric substance blocks 4 and thereafter, the photoresist layer 6 and the protective films are removed. |
