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发明名称
VACUUM PROCESSOR
摘要
申请公布号
JPH11162856(A)
申请公布日期
1999.06.18
申请号
JP19970324624
申请日期
1997.11.26
申请人
SHIBAURA MECHATRONICS CORP
发明人
CHIN YASUSHI
分类号
C23C16/44;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
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