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发明名称
VACUUMIZING METHOD FOR CURVED PASSAGE FOR CHARGED PARTICLES
摘要
申请公布号
JPH11162700(A)
申请公布日期
1999.06.18
申请号
JP19970331900
申请日期
1997.12.02
申请人
ULVAC KURAIO KK;ULVAC CORP
发明人
FURUYA SHINJI;TERAJIMA MITSUSHINA;MORIMOTO HIDETOSHI;NISHIBASHI TSUTOMU;KASHIMOTO KAZUHIRO;SAKURADA YUZO
分类号
H05H7/14;H01J37/02;H05H13/04;(IPC1-7):H05H7/14
主分类号
H05H7/14
代理机构
代理人
主权项
地址
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EDITION PROCESSOR
