| 摘要 |
PROBLEM TO BE SOLVED: To make possible a stable and high-speed and high-precision processing, by applying an electric current to another acceleration and deceleration coil so that apparent inductances of one acceleration and deceleration coil and a control coil may be canceled by each other. SOLUTION: In this stage equipment, a stage 3 is so supported on a guide 1 that it can slide in the driving direction and the current of an acceleration and deceleration coil 17 is controlled at zero in a stationary state at the initial end position. If current in accordance with a positional deviation of a control coil 15 is allowed to flow in the coil 17 in order to control the position of the control coil 15 and thereby force is applied to a movable magnet 5, magnetic flux appears in a yoke and then electromotive force is generated in the two acceleration and deceleration coils 17 to cancel the magnetic flux. The two acceleration and deceleration coils are serially connected so as to cancel electromotive force in the coils and then are connected to a drive for acceleration and deceleration and therefore counter electromotive force is not generated, which is the same status as force is applied only from the control coil 15. By this method, the control coil can be operated even while the acceleration and deceleration coils are conducting, thereby a rapid and very precise positioning. |
