| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain sufficient absorption force for holding and fixing or to conveying an insulated board by reducing the resistance of an insulation dielec tric layer to be less than that of an insulation board. SOLUTION: A glass board 6 for a liquid crystal display is put on an insulation dielectric layer 3 of an electrostatic chuck, connecting a voltage applying electrode 2 and a direct current source 4 thereon, and a voltage V is applied between the voltage applying electrode 2 and the glass substrate 6 for the liquid crystal display by the direct current source 4. Denoting R3 for a resistance of the insulation dielectric layer and R4 for a resistance for the glass substrate 6 for the liquid crystal display, a material of the insulation dielectric layer 3 of the electrostatic chuck and its thickness is selected so that the resistance R3 is less than the resistance R4 . By this means, a voltage V1 applied to the glass substrate 6 for the liquid crystal display can be set to a value dose to the applied voltage V. That is, the sucking force can be generated by an electric charge induced on the glass substrate 6 for the liquid crystal display.</p> |
