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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11163131(A)
申请公布日期
1999.06.18
申请号
JP19970343974
申请日期
1997.11.28
申请人
OKI ELECTRIC IND CO LTD
发明人
KANAMORI JUN
分类号
H01L21/768;H01L21/28;H01L21/60;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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