| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage having extremely simple structure in which the installation space can be decreased extremely for one way movement of X or Y as well as two-dimensional movement of XY. SOLUTION: A stage 10 made of a conductive material is mounted on a stage table 20. A plurality of electrodes 21 are arranged on the upper surface of the stage table 20 along the moving direction of the stage 10 at a specified interval and covered with a dielectric film 25. These electrode 21 are connected with a potential imparting means 24 and applied simultaneously with potentials +V, -V and 0 repeatedly according to a specified order along the moving direction of the stage 10. The potential phase is shifted with time one by one along the moving direction of the stage such that electrostatic attraction and suction act on the stage 10 thus moving the stage 10.</p> |
