| 摘要 |
<p>PROBLEM TO BE SOLVED: To establish good electric connection of probes with an electrode of an object to be inspected by equipping an installation device with a retreat preventing part to prevent the probes from retreating and a stylus retaining part capable of elastic deformation which contacts a deformation part or the stylus rear part, and arranging so that the tail of each probe contacts the retreat preventing part. SOLUTION: When probes 22 are pressed to an object to be inspected 12, each probe 22 makes elastic deformation in a part nearer the stylus tip than the contacting part 28 with an electric conduction part 28 so that the radius of curvature enlarges without retreat of the probe 22 in the circumferential direction of a stylus retainer 24 (in the curving direction of the deformation part 31) and causes an elastic material layer 36 to make elastic deformation compressively. Thereby the stylus tip of each probe 22 makes displacement relative to an electrode part 16, and part of the film on the surface of the electrode part 16 is exfoliated in rubbing. Part of the tail of each probe 22 generates a dint in the elastic material layer 36, which precludes the stylus tip 30 from tumbling in the axial direction of the stylus retainer 24.</p> |
