| 摘要 |
PROBLEM TO BE SOLVED: To increase resistance value precision and reduce current noise, by performing thermal treatment at a specified peak temperature, after resistance paste is printed and baked, and a resistance value is corrected to be a desired value by laser trimming. SOLUTION: A forming method of a thick film resistor uses difference of a temperature where current noise is reduced and a temperature where change of resistance value is increased. The difference is caused by thermal treatment of the thick film resistor after laser trimming. That is, after the resistance value of the thick film resistor is corrected by laser trimming, thermal treatment is performed in the range of peak temperature 300-550 deg.C, so that current noise increased by the laser trimming is reduced again, scarcely changing the resistance value corrected by the laser trimming. When glass paste is printed and baked on the thick film resistor before the laser trimming, the change of resistance value can be more reduced by thermal treatment in the above temperature range. |
