| 摘要 |
PROBLEM TO BE SOLVED: To enhance a film forming accuracy or an etching accuracy for a fixed body by using a nitriding aluminum sintered material the volume intrinsic resistance of a specific temperature domain of which stays within a specified range. SOLUTION: This electrostatic chuck 1 is suck that a main face of a discoidal ceramic body 2 is set as a connecting face 3 with a body W to be fixed, and a discoidal electrode 4 for an electrostatic sucking is embedded in the ceramic body 2. The ceramic body 2 has a dielectric constant higher than or equal to 13 and is formed by a nitriding aluminum sintered material the volume intrinsic resistance under 200 deg.C of which stays in a range equal to or more than 10<9> Ω.cm and less than 10<12> Ω.cm. By applying a voltage between the body W installed on the connecting face 3 and the electrode 4 for the electrostatic sucking embedded in the ceramic body 2, an sucking force of Johnson-Rahbeck effect is generated in a temperature atmosphere equal to or below 200 deg.C, and the body W can be held firmly. |
