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发明名称
SAMPLE DEVICE FOR CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH11162388(A)
申请公布日期
1999.06.18
申请号
JP19970330418
申请日期
1997.12.01
申请人
JEOL LTD
发明人
TOKORO YUICHIRO
分类号
G01N1/28;H01J37/20;(IPC1-7):H01J37/20
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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