发明名称 Microstructured metallic body produced by direct electroforming using a precision metallic negative body
摘要 A metallic microstructure body (positive body) is produced by electroforming using a negative body which is coated with an electrically insulating layer except at structure base regions. An Independent claim is also included for production of a metallic microstructure body (positive body) by an electroforming process comprising: (a) coating the structures of a negative body with an electrically insulating material; (b) selectively removing the coating from the bases of the structures; and (c) filling the structures by metal electrodeposition to obtain the positive body.
申请公布号 DE19753948(A1) 申请公布日期 1999.06.17
申请号 DE19971053948 申请日期 1997.12.05
申请人 INSTITUT FUER MIKROTECHNIK MAINZ GMBH, 55129 MAINZ, DE 发明人 WEBER, LUTZ, DR., 55288 GABSHEIM, DE
分类号 B81C1/00;C25D1/10;(IPC1-7):C25D1/10;C23F4/00;H01L49/00 主分类号 B81C1/00
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