Sputtering cathode for production of thin layers on substrates in a vacuum chamber

摘要

The cathode (3, 4) has a target (25, 26) and a magnet yoke (11, 12) which holds the target and is provided with a channel (9, 10) for target cooling. Pipe segments (15, 16) connect the magnet yoke to the vacuum chamber wall (5) and also serve for coolant supply and removal respectively to and from the pipe pairs (7, 7', 8, 8') in the channels (9, 10).