CAPACITANCE TYPE PRESSURE SENSOR UNIT

摘要

A capacitance type pressure sensor unit which can be assembled without applying any high pressure to a circuit board. The base section (6b) of the main body (6) is housed in the peripheral wall section (13b) of a housing case (13) constituting the main body of the case (13) and fixed by caulking the base section (6b) with the end section (13e) of the wall section (13b). A pressure sensor element (3) composed of first and second insulating substrates (1 and 2) is set on the bottom wall section (13a) of the wall section (13b) and a fluid chamber (15) to which a fluid to be measured is introduced is formed between the rear surface of the substrate (1) and the bottom wall section (13a). A circuit board (9) housed in a circuit parts housing chamber (7) in the base section (6b) of the main body (6) is supported in the chamber (7) in a floating state by the conductors (8, ...) for connection of the connector (5), a plurality of metallic terminal fittings (19, ...) which electrically connect the output electrode (2c) of the pressure sensor element (3) to the circuit board (9), and a terminal fitting (22) for grounding which electrically connects the grounding electrode of the circuit board (9) to the housing case (13).