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发明名称
VERFAHREN ZUR HERSTELLUNG EINES EINEM GRABEN BENACHBARTEN DIFFUSIONSGEBIETES IN EINEM SUBSTRAT
摘要
申请公布号
DE59505914(D1)
申请公布日期
1999.06.17
申请号
DE19955005914
申请日期
1995.02.01
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
SCHWALKE, UDO, D-84431 HELDENSTEIN, DE;SEBALD, MICHAEL, D-91093 HESSDORF, DE;SCHELER, ULRICH, D-80809 MUENCHEN, DE
分类号
H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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