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发明名称
Optische Strahlungsmeß-Vorrichtung
摘要
申请公布号
DE19852321(A1)
申请公布日期
1999.06.17
申请号
DE19981052321
申请日期
1998.11.12
申请人
STEAG AST ELEKTRONIK GMBH, 85551 KIRCHHEIM, DE
发明人
HAUF, MARKUS, 85551 KIRCHHEIM, DE
分类号
G01J5/00;H01L21/00;(IPC1-7):G01J1/04;G01J1/42;G01J5/10;H01L21/324
主分类号
G01J5/00
代理机构
代理人
主权项
地址
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