| 发明名称 |
Process for preparing a limo<sub>2</sub> type heterometallic oxide film |
| 摘要 |
An organometallic compound of formula LiOR'.(R'O)MR2 is vaporized at a low temperature and employed in a CVD process of a heterometallic oxide film of the LiMO2 type, wherein M is a Group 13 element such as Al or Ga; R is a C1-10 alkyl group; and R' is a C2-10 alkyl group. |
| 申请公布号 |
AU1509099(A) |
申请公布日期 |
1999.06.16 |
| 申请号 |
AU19990015090 |
申请日期 |
1998.12.02 |
| 申请人 |
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY |
发明人 |
YUN SOO KIM;WON YONG KOH;SU JIN KU |
| 分类号 |
C07F5/00;C01D15/00;C07F5/06;C23C16/40 |
主分类号 |
C07F5/00 |
| 代理机构 |
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