Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another,申请号GB19990008952-传众专利搜索

发明名称	Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another
摘要
申请公布号	GB9908952(D0)	申请公布日期	1999.06.16
申请号	GB19990008952	申请日期	1999.04.19
申请人	APPLIED MATERIALS INC	发明人
分类号	G01B11/00;B25J9/10;B25J13/08;G01B9/08;G01B11/27;H01J37/317;H01L21/00;H01L21/265;H01L21/677;H01L21/683;H01L21/687	主分类号	G01B11/00
代理机构		代理人
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