发明名称 Diagnostic method and apparatus for vacuum pumps
摘要 <p>The invention relates to a diagnostic method and apparatus for detecting in advance the wear of rotatable components in vacuum pumps, said pumps comprising gas pumping stages formed by rotor disks (113, 114) secured to a rotatable shaft (123) driven by an electric motor, wherein a warning signal for either a pre-alarm or an alarm wear condition is generated when predetermined wear conditions are reached, by expanding the signal from an accelerometer in contact with the vacuum pump into a Fourier spectrum. <IMAGE></p>
申请公布号 EP0851127(A3) 申请公布日期 1999.06.16
申请号 EP19970202185 申请日期 1997.07.12
申请人 VARIAN S.P.A. 发明人 DE SIMON, MAURO
分类号 F04D19/04;F04D27/02;(IPC1-7):F04D27/02 主分类号 F04D19/04
代理机构 代理人
主权项
地址