发明名称 A method of depositing a layer
摘要 This invention relates to a method of depositing a layer on an exposed surface of an insulating layer of material. The method includes treating the exposed surface with hydrogen or a gaseous source of hydrogen in the presence of a plasma, prior to or during deposition of a metallic layer.
申请公布号 GB9908882(D0) 申请公布日期 1999.06.16
申请号 GB19990008882 申请日期 1999.04.20
申请人 TRIKON HOLDINGS LIMITED 发明人
分类号 H01L21/28;C23C14/02;C23C14/18;C23C14/34;H01L21/203;H01L21/285;H01L21/302;H01L21/3065;H01L21/316;H01L21/441;H01L41/22 主分类号 H01L21/28
代理机构 代理人
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