发明名称 Low oxygen heater
摘要 A heater is configured to reduce oxygen in the melt near the growing crystal is provided by defining a high temperature region in an upper region of the heater, above a melt surface of semiconductor material from which a crystal is grown. This effectively shifts the heat balance of the system upwards, and alters thermal convections of oxygen within the melt. Accordingly, the primary vehicle for transporting oxygen to the growing crystal is suppressed.
申请公布号 US5911825(A) 申请公布日期 1999.06.15
申请号 US19970941534 申请日期 1997.09.30
申请人 SEH AMERICA, INC. 发明人 GROAT, CLIFFORD W.;IWASAKI, ATSUSHI
分类号 C30B15/14;(IPC1-7):C30B35/00 主分类号 C30B15/14
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