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发明名称
SPUTTERING DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE USING IT
摘要
申请公布号
JPH11158615(A)
申请公布日期
1999.06.15
申请号
JP19970326817
申请日期
1997.11.27
申请人
NEC CORP
发明人
AIZAWA KAZUO
分类号
C23C14/34;H01L21/203;H01L21/285;H01L21/336;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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