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发明名称
WET ETCHING DEVICE
摘要
申请公布号
KR200145916(Y1)
申请公布日期
1999.06.15
申请号
KR19970002071U
申请日期
1997.02.12
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
JI, JOONG-MAN
分类号
G03F7/30;(IPC1-7):G03F7/30
主分类号
G03F7/30
代理机构
代理人
主权项
地址
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