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发明名称
WAFER TRANSFER APPARATUS
摘要
申请公布号
KR100203747(B1)
申请公布日期
1999.06.15
申请号
KR19960019736
申请日期
1996.06.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JANG, SUNG-HUN
分类号
H01L21/677;H01L21/22;H01L21/673;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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