发明名称 Inertial positioner
摘要 An inertial positioner comprising a base plate and a carriage plate (2) slidably connected to one another via a bearing assembly (3) so as to allow relative movement of the plates in a positioning direction. The bearing assembly (3) comprises two sets of caged ball bearings seated in respective pairs of V-grooves (25 and 26) formed in the facing surfaces of the base and carriage plates, the V-groove pairs extending spaced apart in the positioning direction. An actuator comprising a piezoelectric element (4) and a rod (5) extends between the plates (1 and 2), the piezoelectric element (4) being secured to the carriage plate (2) and the rod (5) forming a frictional engagement characterized by a force F with the base plate via a collar (20) fastened to the base plate via biasing means (not shown). In operation, a periodic saw-tooth voltage is applied to the piezoelectric element (4) to produce motion.
申请公布号 US5912527(A) 申请公布日期 1999.06.15
申请号 US19970901848 申请日期 1997.07.28
申请人 DR. KHALED KARRAI UND DR. MILES HAINES GESELLSCHAFT BURGERLICHEN RECHTS 发明人 KARRAI, KHALED
分类号 H01L41/09;H02N2/04;H02N2/06;(IPC1-7):H02N2/00;H01L41/08 主分类号 H01L41/09
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